我公司代理美國Torr公司，高質(zhì)量PVD系統(tǒng)，產(chǎn)品系列包括熱蒸發(fā)系統(tǒng)，
電子束蒸發(fā)系統(tǒng)E-beam，磁控濺射系統(tǒng)sputtering，反應(yīng)離子刻蝕RIE, ICP
刻蝕機(jī)， 離子束刻蝕系統(tǒng)IBE，脈沖激光沉積系統(tǒng)PLD，等離子增強(qiáng)氣相沉
積系統(tǒng)PECVD，除了標(biāo)準(zhǔn)的系統(tǒng)之外，我們還可以按照客戶要求量身定制，
滿足不同客戶的苛刻要求。可提供電子束與熱蒸發(fā)及磁控濺射聯(lián)合系統(tǒng)，
完成多功能苛刻要求的應(yīng)用。
COMPONENT | OPTIONS |
Chamber | Choose Stainless Steel or Quartz, Cylindrical with Opening Lid or Box Shaped with Full Opening Front Door, Number, Size & Location of Viewports, Single or Multiple Chambers [Load Lock] |
Gas Delivery | Choose Multiple M Flow Controllers, Gas Controllers, Custom Gas Showers, Independent N2 Venting Systems, Corrosive and|or Non-Corrosive Ges, Lines & Valves |
Electron Beam System | Choose Single or Multiple Pockets, Crucible Capacity, High Voltage Power Supply, XY Sweep Controller with Adjustable Variable Sweep Pattern |
Magnetron Sputtering System | Choose Single or Multiple Guns, Gun Size, Adjustable, Retractable or Fixed Mounting, RF and|or DC Power Supplies, Automatic or Manual Matching Network |
Resistive Thermal System | Choose Single or Multiple Sources, Boats, Baskets & Coils, Independent Variable Power Supply |
Ion Mill Source | Choose Beam Diameter, Power Source, Gas Delivery System |
Etching System | Choose DC and|or RF Power Supplies, Gas Deliver System |
Substrate Stage | Choose Stage Diameter, Stage Rotation and|or Tilt, Mask Holders, Stage Heating and|or Cooling |
Thickness Sensors & Monitors | Choose Te of Thickness Sensor, Deposition Rate Controller, Manual or Automatic Process Control |
Additional Options | Compact Table or Stand Alone Cabinet Systems, Manual or Automatic Controls, Individual Component Cooling Systems, Sheilds & Shutters, Chamber Liners, Renewable Extended Warranties and Much More! |
If you are not sure exactly what options your system or your process requires, our staff will help you design the system that is right for your needs and that will fit your budget. | |
